WebBrooks Product Guide SP410 201110 FINAL - Read online for free. Scribd is the world's largest social reading and publishing site. Brooks Product Guide SP410 201110 FINAL. Uploaded by arturo velazco. 0 ratings 0% found this document useful (0 votes) 3 views. 31 pages. Document Information WebThe following table lists theoretical gas correction factors for various gases with respect to Nitrogen for thermal-based mass flow controllers. Please note that a non-linearity may exist between a Nitrogen calibration and the actual flow of process gases. Gas. Symbol. Specific Heat, CP cal/g°C.
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